Studying of various nanolithography methods by using Scanning Probe Microscope

International Journal of Nano Dimension

مقاله 1، دوره 1، شماره 3، خرداد 2011، صفحه 159-175   

نوع مقاله: Review

شناسه دیجیتال (DOI): 10.7508/ijnd.2010.03.001

نویسندگان

S. Sadegh Hassani^* ؛ Z. Sobat

Nanotechnology research center, Research institute of petroleum industry (RIPI), Tehran, Iran.

چکیده

The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithographical methods mostly based on making nano-structures is presented.

کلیدواژه‌ها

Nano-lithography؛ Atomic Force Microscopy؛ Scanning probe lithography؛ nanostructure؛ surface nano-modification