Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation

ADMT Journal

مقاله 11، دوره 12، شماره 2، شهریور 2019، صفحه 103-109   

نوع مقاله: Original Article

نویسندگان

Mohammad Tahmasebipour^{* 1}؛ Younes Tahmasebipour²؛ Ali Vafaie³

¹Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran

²Micro/Nano-Fabrication Technologies Development Laboratory, Faculty of New sciences & Technologies, University of Tehran, Tehran, Iran

³Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran

چکیده

Metal-based microelectromechanical systems are widely used in applications such as micro-energy harvesters, micro-heat exchangers and micro-electromagnetic that require high strength and flexibility. In the fabrication of such systems, micro wire electrical discharge machining (MicroWEDM) is majorly used. This paper studies the effect of the MicroWEDM process parameters on the dimensional deviation of machined MEMS structures including microcantilevers and micro-beams using the Taguchi method. Using optimal levels of the parameters including pulse duration (0.8 µs), cutting speed (8.4 mm/min), voltage (17 V) and wire tension (0.5 kg), the dimensional deviation is reduced about 8.65 times compared with the average of experiments results. The order of effect importance of the process parameters on the dimensional deviation of microstructures obtained by the ANOVA analysis of S/N ratios is as follows: pulse duration, wire tension, process voltage and cutting speed. Dimensional deviation of the micro-features was reduced to 1 μm using the optimal levels of the process parameters.

کلیدواژه‌ها

MEMS؛ Microbeam؛ Microcantilever؛ Micromachining؛ Micro Wire Electrical Discharge Machining؛ Micro-WEDM

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