Micro Electropolishing of the MEMS Metallic Structures Fabricated by the Micro WEDM Process

ADMT Journal

دوره 15، شماره 1، خرداد 2022، صفحه 11-19   

نوع مقاله: Original Article

شناسه دیجیتال (DOI): 10.30486/admt.2022.1928592.1277

نویسندگان

Mohammad Tahmasebipour^{* 1}؛ Younes Tahmasebipour²؛ Mahya Boujari Aliabadi¹؛ Shadi Ebrahimi¹

¹Faculty of New sciences and Technologies, University of Tehran, Tehran, 14395 -1561, Iran Micro/Nanofabrication Technologies Lab, Faculty of New Sciences and Technologies, University of Tehran, Tehran, 14395 -1561, Iran

²Micro/Nanofabrication Technologies Lab, Faculty of New Sciences and Technologies, University of Tehran, Tehran, 14395 -1561, Iran

چکیده

In this study, the micro electro-polishing method was employed to improve the surface quality of microbeams machined by the micro WEDM method and to remove the recast layer. This approach changes the dimensions of the microbeams, as a result of the electrochemical corrosion, in addition to the elimination of the recast layer. To diminish the impact of this process on the dimensional deviation of the fabricated microbeams, the influence of the micro electro-polishing process parameters such as voltage, duration, cathode diameter, and electrolyte composition on the dimensional deviation of microbeams was studied using the Taguchi method. The optimum values of process parameters were determined by the S/N ratios analysis, and the order of parameters importance was determined through analysis of variance of the S/N ratios. It was found that the optimal levels of the process parameters are voltage of 2 V, process duration of 20 s, cathode diameter of 50 mm, and electrolyte composition of 25-5-40 ml (sulfuric-phosphoric-water) within the range of experiments. By using the optimum values of the parameters, the dimensional deviations were found to be 5.23 times lower compared to the average of the results.  The importance of process parameters was found to follow this order: electropolishing duration, electrolyte composition, cathode diameter, and process voltage.

کلیدواژه‌ها

Microelectromechanical Systems؛ MEMS؛ Micro Wedm؛ Micro Polishing؛ Micro Electropolishing؛ Wire Electrical Discharge Machining

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