The growth of Diamond like carbon nanostructures: Investigation of the affecting factors

Journal of Nanoanalysis

مقالات آماده انتشار، پذیرفته شده، انتشار آنلاین از تاریخ 27 مهر 1396

نوع مقاله: Original Research Paper

شناسه دیجیتال (DOI): 10.22034/jna.2017.540582.1008

نویسندگان

Morasa Amani Malkeshi¹؛ karim Zare^{* 2}؛ Mahmood Ghorannevis³؛ Zohre Ghorannevis⁴؛ omid Moradi⁵

¹aDepartment of chemistry, Faculty of Basic Sciences, Sciences and Research Branch, Islamic Azad University, Tehran, Iran

²Islamic azad university

³Plasma Physics Research Center, Science and Research Branch, Islamic Azad University

⁴Department of Physics, Karaj Branch, Islamic Azad University, Karaj, Iran

⁵Department of Chemistry , ShahrQods Branch, Islamic Azad University , ShahreQods , Iran

چکیده

Using DC- Plasma Enhanced Chemical Vapor Deposition (PECVD) system, the impact of pure Co on the growth of diamond-like carbon (DLC) nano-structures was investigated. In this study, Acetylene (C2H2) was diluted in H2 and used as the reaction gas and Co nano-particles were used as the catalyst. The effect of preparing Co catalyst on temperatures of 240ο C and 350ο C and growth conditions was studied. The results showed that the Co catalyst sputtering at 350ο-C temperature has a significant impact on purity, morphology, and synthesized diamond-like carbon nano- structures. This research was conducted to investigate the effect of catalyst preparation and growth conditions. Scanning Electron Microscopy (SEM), X-ray diffraction (XRD), Raman spectroscopy were used to characterize the diamond-like carbon nano- structures produced under different conditions.

Using DC- Plasma Enhanced Chemical Vapor Deposition (PECVD) system, the impact of pure Co on the growth of diamond-like carbon (DLC) nano-structures was investigated. In this study, Acetylene (C2H2) was diluted in H2 and used as the reaction gas and Co nano-particles were used as the catalyst. The effect of preparing Co catalyst on temperatures of 240ο C and 350ο C and growth conditions was studied. The results showed that the Co catalyst sputtering at 350ο-C temperature has a significant impact on purity, morphology, and synthesized diamond-like carbon nano- structures. This research was conducted to investigate the effect of catalyst preparation and growth conditions. Scanning Electron Microscopy (SEM), X-ray diffraction (XRD), Raman spectroscopy were used to characterize the diamond-like carbon nano- structures produced under

کلیدواژه‌ها

temperature؛ SEM؛ XRD؛ Raman spectroscopy؛ DLC